- Automatic laser decapsulation system
- All types of semiconductor package can be removed
- Any material(Au, Cu, Al) of wire part and 2nd bonding area can be opened
- Effective decapsulation solution for Cu wire chip : Minimize the damage on Cu wire by chemical etching after laser operation
- A few hundred microns of EMC on die surface can be opened with chemical etching(by manual or MIS Wet Etch : Minimal acid use)
- Easy, simple, fast and safe operation
> Vision camera provides real time image
> User can set the decap area by mouse drag / numerical value input
> User can see laser decapsulation process & result on monitor screen
> Superimposing X-ray image on real-time sample picture is available
> Auto door lock : System door is not opened during laser operation
> Automatic Z axis adjustment by PC program
- User can observe the operation process through the window(protected from laser radiation)
- Repetitions made simple using recipe files
- Fume & Dust can be exhausted (Option: Fume & Dust collector) |